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Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

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About Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena is a peer-reviewed academic journal published by American Institute of Physics based in the United States. It operates on a subscription-based basis, with access typically provided through institutional libraries or pay-per-view. Prospective authors should verIFy the journal's sCOPE, formatting requirements, and current fees on the publisher website before preparing a submission.

Editorial Perspective & Metric Analysis

Based on current metadata, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena maintains a standard position in the US academic market.

ISSN (Print) 1071-1023
ISSN (Online) 1520-8567
Publisher American Institute of Physics
Country United States
APC / Cost Inquire with Publisher
About Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena is a peer-reviewed academic journal published by American Institute of Physics based in the United States. It operates on a subscription-based basis, with access typically provided through institutional libraries or pay-per-view. Prospective authors should verify the journal's scope, formatting requirements, and current fees on the publisher website before preparing a submission.

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena is published by American Institute of Physics from US as a journal. It has published 11,784 works to date, attracting 242,381 citations across the literature. The journal carries an h-index of 141, reflecting both depth of catalog and sustained citation impact. Recent publishing activity centers on Semiconductor materials and devices, Advancements in Photolithography Techniques, Semiconductor Quantum Structures and Devices.
Frequently Asked Questions about Journal of Vacuum Science & …

No, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena is not an open access journal.

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena is published by American Institute of Physics.
Live Indexing Status
Updated April 2026

Track real-time indexing metrics to ensure this journal meets your academic requirements.

OpenAlex
Verified
DOAJ
Non-OA
Predatory Check
Clean
Impact Factor

No impact factor data available.

Works Published per Year (2003–2015)

Annual publication volume sourced from OpenAlex. Current year omitted (partial data).

Journal at a Glance
11,784
Total Works
242,381
Total Citations
141
h-index

Source: OpenAlex — refreshed daily.

Top Research Topics

The areas where Journal of Vacuum Science & … most frequently publishes, ranked by article volume.

  1. Semiconductor materials and devices
    Engineering
    3,517 works
  2. Advancements in Photolithography Techniques
    Engineering
    2,025 works
  3. Semiconductor Quantum Structures and Devices
    Physics and Astronomy
    1,574 works
  4. Integrated Circuits and Semiconductor Failure Analysis
    Engineering
    1,515 works
  5. Electron and X-Ray Spectroscopy Techniques
    Materials Science
    1,271 works
  6. Force Microscopy Techniques and Applications
    Physics and Astronomy
    1,256 works
  7. Metal and Thin Film Mechanics
    Engineering
    923 works
  8. Ion-surface interactions and analysis
    Engineering
    850 works
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Metadata

Last updated: Apr 24, 2026

Updated by: openalex_bulk

OpenAlex ID: S4210169477
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