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Journal of Vacuum Science and Technology

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About Journal of Vacuum Science and Technology

Journal of Vacuum Science and Technology is a peer-reviewed academic journal published by American Institute of Physics based in the United States. It operates on a subscription-based basis, with access typically provided through institutional libraries or pay-per-view. Prospective authors should verIFy the journal's sCOPE, formatting requirements, and current fees on the publisher website before preparing a submission.

Editorial Perspective & Metric Analysis

Based on current metadata, Journal of Vacuum Science and Technology maintains a standard position in the US academic market.

ISSN (Print) 0022-5355
ISSN (Online) 2331-1754
Publisher American Institute of Physics
Country United States
APC / Cost Inquire with Publisher
About Journal of Vacuum Science and Technology

Journal of Vacuum Science and Technology is a peer-reviewed academic journal published by American Institute of Physics based in the United States. It operates on a subscription-based basis, with access typically provided through institutional libraries or pay-per-view. Prospective authors should verify the journal's scope, formatting requirements, and current fees on the publisher website before preparing a submission.

Journal of Vacuum Science and Technology is published by American Institute of Physics from US as a journal. It has published 5,546 works to date, attracting 119,857 citations across the literature. The journal carries an h-index of 126, reflecting both depth of catalog and sustained citation impact. Recent publishing activity centers on Semiconductor materials and devices, Electron and X-Ray Spectroscopy Techniques, Metal and Thin Film Mechanics.
Links
Journal Homepage
Frequently Asked Questions about Journal of Vacuum Science and …

No, Journal of Vacuum Science and Technology is not an open access journal.

Journal of Vacuum Science and Technology is published by American Institute of Physics.
Live Indexing Status
Updated April 2026

Track real-time indexing metrics to ensure this journal meets your academic requirements.

OpenAlex
Verified
DOAJ
Non-OA
Predatory Check
Clean
Impact Factor

No impact factor data available.

Works Published per Year (2009–2020)

Annual publication volume sourced from OpenAlex. Current year omitted (partial data).

Journal at a Glance
5,546
Total Works
119,857
Total Citations
126
h-index

Source: OpenAlex — refreshed daily.

Top Research Topics

The areas where Journal of Vacuum Science and … most frequently publishes, ranked by article volume.

  1. Semiconductor materials and devices
    Engineering
    939 works
  2. Electron and X-Ray Spectroscopy Techniques
    Materials Science
    912 works
  3. Metal and Thin Film Mechanics
    Engineering
    583 works
  4. Ion-surface interactions and analysis
    Engineering
    547 works
  5. Surface and Thin Film Phenomena
    Physics and Astronomy
    511 works
  6. Semiconductor materials and interfaces
    Physics and Astronomy
    401 works
  7. Advanced Chemical Physics Studies
    Physics and Astronomy
    373 works
  8. nanoparticles nucleation surface interactions
    Earth and Planetary Sciences
    349 works
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Metadata

Last updated: Apr 24, 2026

Updated by: openalex_bulk

OpenAlex ID: S52593085
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