Publication & Citation Trends
Publications
0 total
No publications found.
Research Topics
Semiconductor materials and devices
(35)
Advanced MEMS and NEMS Technologies
(32)
Acoustic Wave Resonator Technologies
(19)
Metal and Thin Film Mechanics
(18)
Mechanical and Optical Resonators
(17)
Affiliations
California Institute of Technology
University of California, San Diego
Tieto (Finland)
VTT Technical Research Centre of Finland